Smart Material Systems and MEMS: Design and Development Methodologies

Smart Material Systems and MEMS: Design and Development Methodologies


featuring unified assurance of the layout and modeling of clever micro- and macrosystems, this ebook addresses fabrication concerns and descriptions the demanding situations confronted through engineers operating with shrewdpermanent sensors in a number of purposes.

Part I bargains with the basic techniques of a customary clever approach and its constituent elements. initial fabrication and characterization thoughts are brought prior to layout ideas are mentioned intimately. half III provides a finished account of the modeling of shrewdpermanent structures, clever sensors and actuators. half IV builds upon the basic ideas to investigate fabrication thoughts for silicon-based MEMS in additional detail.

Practicing engineers will enjoy the designated overview of purposes in communications know-how, aerospace, biomedical and mechanical engineering. The ebook presents a necessary reference or textbook for graduates following a direction in shrewdpermanent sensors, actuators and systems.

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